Quartz tube for CVD process in semiconductor fabrication
1.quartz glass tube for CVD
2. purity 99.99% min
3.OEM is ok
4. No bubbles No airline
5.ISO 9001-2000
Advantage of the quartz glass tube:
1. High temperature resistant, 1100 degree.
2. Corrosion-resistant
3. Good thermal stability
4. Good transparency for light
5. Good electrical insulation
Your design and drawing are accepted, we can make as your requirement. Waitting for your special specification to offer.
Range of OD
OD
WT
Siding
Out of Rou n d
Bow1220mm
≤6mm
±2.0%
±10%
12%
2.0%
2.5mm
6.00-15.00mm
±1.25%
±8%
10%
1.5%
2.5mm
15.00-20.00mm
±1.25%
±10%
15%
1.5%
2.5mm
20.00-25.00mm
±1.25%
±10%
15%
1.5%
3.0mm
25.00-30.00mm
±1.35%
±12%
15%
1.5%
3.0mm
30.00-80.00mm
±1.5%
±14%
15%
2.0%
3.0mm
80.00-100.00mm
±1.0%
±0.5mm
15%
2.0%
3.0mm
100.00-120.00
±1.5%
±0.8mm
15%
2.0%
3.0mm
120.00-160.00
±1.8%
±1.0mm
20%
2.5%
3.0mm
160.00-180.00
±3.0%
±1.0mm
25%
2.5%
3.0mm
180.00-200.00
±4.0%
±1.5mm
25%
2.5%
3.0mm
200.00-240.00
±4.0%
±1.5mm
25%
2.5%
3.0mm
240.00-280.00
±6.0%
±2.0mm
25%
2.5%
3.0mm
280.00 above
±8.0%
±3.0mm
25%
2.5%
3.0mm
ALFeKNaLiCaMgCuMnCrBTi5-120.19-1.50.71-1.60.12-1.760.38-0.760.17-1.230.05-0.50.050.05<0.05<0.1<1.0
Spectral transmission at1.0mm thickness
m m<22025528031535038590780%89919393939393.293.4
Physical Properties
(g/cc)Density20 °C kg.m-32.2Degree of Hardness Moh's Scale5.5-5.6Softening point(degree)1683Annealing point1215Defoamation Point1120